Xie, Xiaopeng; Xu, Liang; Wang, Yongjie; Shen, Le; Fan, Xuewu; Fan, Wenhui; Li, Chuang; Zhao, Hui
A cycloid-like variable curvature mirror (VCM) for zoom-imaging systems was investigated. An analytical-deformation solution to a thin-elastic plate with a cycloid-like thickness distribution and simply supported boundary condition under uniform pressure was found using a small parameter method. The finite-element analysis of the thin-elastic plate and designed VCM showed a good correlation with the analytical solution. The VCM was manufactured and polished to the initial shape with a root mean square (RMS) of 1/80 lambda. Finally, with air-pressure-based actuation testing under 0.07 MPa, the VCM deforms approximately 36.89 mu m and maintains the RMS surface performance of 1/10 lambda, 1/40 lambda with and without spherical aberrations, respectively.
The result was published on OPTICS EXPRESS. DOI: 10.1364/OE.426989
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