At present, the scale of monocrystalline silicon furnace and other precision machines can only cleaned up by a single kind of cleanout fluid. However, the complicated structures and parts made of various materials make it impossible to completely clean up the machines with the single kind of cleanout fluid which could even erode some materials, therefore, the remained scale may increase the practical cost of the said machines and the eroded parts may sow the seeds of serious safety loophole.
Researchers of Xi’an Institute of Optics and Precision Mechanics of CAS went into the problems and found out a way to clean up the scale of monocrystalline silicon furnaces and it is mainly used to clean up the precision machines like monocrystalline silicon furnace. The method solves the problems of incomplete cleaning and damages to some materials. Details of the method are that when cleaning up the scale of a monocrystalline silicon furnace, put some water into a reservoir which is equipped with ultra-sonic oscillation and heating fittings and heat the water to 10～60℃, slowly inject some acid liquor into the reservoir, turn on the ultrasonic wave to stir the liquid, and then the scale will be completely cleaned up through the high-speed washing and reaction of the cleanout fluid.
This method was granted the invention patent authorization on May 2 and the patent No. is ZL201010574823.7.